Fabrication of Microlens Arrays with Well-controlled Curvature by Liquid Trapping and Electrohydrodynamic Deformation in Microholes

1. Xiangming Li, 
2. Yucheng Ding^*, 
3. Jinyou Shao^*, 
4. Hongmiao Tian, 
5. Hongzhong Liu

Article first published online: 22 MAR 2012

DOI: 10.1002/adma.2011046

The microlens array (MLA) or micromirror array (MMA) is one of the most important units in many optical devices and photoelectronic systems. The paper presents a process for fabricating an MLA with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes. The approach has been shown capable of generating large-area and high-quality MLAs or MMAs economically.